Overview

Senior Process Engineer responsible for tungsten deposition and etch-back processes, with a primary focus on W deposition on the Novellus Altus platform. Collaborate with equipment engineers to characterize hardware, resolve complex issues, and continuously improve process stability, capability, and yield.

Responsibilities

• Develop, sustain, and optimize CVD tungsten, WALD, and tungsten etch-back processes, focusing on Pulsed Nucleation Layer (PNL) tungsten on Novellus Altus
• Drive hardware and recipe characterization on Altus systems to improve film uniformity, reduce defects, and enhance tool productivity
• Perform structured troubleshooting and root-cause analysis to resolve process excursions and chronic issues
• Correlate process conditions with film properties and device performance using structural, electrical, and reliability data
• Collaborate with integration, device, yield, equipment teams, and ...